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About this Engineering article
Effective Passivation of Black Silicon Surfaces by Atomic Layer Deposition by Repo, Päivikki; Haarahiltunen, Antti; Sainiemi, Lauri; Yli-Koski, Marko; Talvitie, Heli; Schubert, Martin C.; Savin, Hele is a Engineering article available to read on EtoBox.
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- Author
- Repo, Päivikki; Haarahiltunen, Antti; Sainiemi, Lauri; Yli-Koski, Marko; Talvitie, Heli; Schubert, Martin C.; Savin, Hele
- Publisher
- Institute of Electrical and Electronics Engineers; IEEE Electron Devices Society; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 2156-3381)
- Published
- 2013
- Field
- Engineering (Physical Sciences)