About this scholarly article

SPIE Proceedings [SPIE Optics & Photonics - San Diego, CA (Sunday 13 August 2006)] Novel Optical Systems Design and Optimization IX - Optical illumination and critical dimension analysis using the through-focus focus metric method by Attota, Ravikiran; Silver, Richard M.; Potzick, James; Sasian, José M.; Turner, Mary G. is a scholarly article available to read on EtoBox.

Author

Attota, Ravikiran; Silver, Richard M.; Potzick, James; Sasian, José M.; Turner, Mary G.

Publisher

SPIE

Published

2006