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Stress and Oxidation Behaviours of R.f.-Sputtered (Ti, A1) N Films by Igor Oliveira Nascimento is a document available to read on EtoBox.

What is Stress and Oxidation Behaviours of R.f.-Sputtered (Ti, A1) N Films about?

(Ti,A1)N thin films were deposited onto a2 steel by reactive r.f. Magnetron sputtering. After heating at 600 degC, the TiN film spalled off and iron oxides formed on the substrate surface. The addition of A1 atoms promoted the oxidation resistance of the (Ti),A1)N coating in comparison with pure TiN.

Author
Igor Oliveira Nascimento
Language
EN