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H-14 Mems Tunable Silicon Nano-wire Air-gap Coupling For Coupler Switch And Interferometer by Akihama, Y (author);Ikeda, T (author);Kanamori, Y (author);Hane, K (author) is a scholarly article available to read on EtoBox.

Author

Akihama, Y (author);Ikeda, T (author);Kanamori, Y (author);Hane, K (author)