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About this Engineering article
Three-dimensional Step–height Measurement Using Sinusoidal Wavelength Scanning Interferometer with Four-step Phase-shift Method by Choi, Samuel; Takahashi, Shouhei; Sasaki, Osami; Suzuki, Takamasa is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Choi, Samuel; Takahashi, Shouhei; Sasaki, Osami; Suzuki, Takamasa
- Publisher
- The International Society for Optical Engineering; SPIE - International Society for Optical Engineering; S P I E - International Society for Optical Engineering; SPIE-Intl Soc Optical Eng (ISSN 0091-3286)
- Published
- 2014
- Field
- Engineering (Physical Sciences)
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