Opening book details…
About this Engineering article
Surface Smoothing of Polycrystalline Si Waveguides With Gas-Cluster Ion Beams by Toyoda, N.; Lee, K. K.; Luan, H-C.; Lim, D. R.; Agarwal, A. M.; Wada, K.; Kimerling, L. C.; Allen, L. P.; Fenner, D. B.; Kirkpatrick, A. R. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Toyoda, N.; Lee, K. K.; Luan, H-C.; Lim, D. R.; Agarwal, A. M.; Wada, K.; Kimerling, L. C.; Allen, L. P.; Fenner, D. B.; Kirkpatrick, A. R.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1999
- Field
- Engineering (Physical Sciences)