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About this Engineering article
Virtual Fabrication Using Directed Self-assembly for Process Optimization in a 14-Nm Dynamic Random Access Memory by Kamon, Mattan; Akbulut, Mustafa; Yan, Yiguang; Faken, Daniel; Pap, Andras; Allampalli, Vasanth; Greiner, Ken; Fried, David is a Engineering article available to read on EtoBox.
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- Author
- Kamon, Mattan; Akbulut, Mustafa; Yan, Yiguang; Faken, Daniel; Pap, Andras; Allampalli, Vasanth; Greiner, Ken; Fried, David
- Publisher
- The International Society for Optical Engineering; SPIE - International Society for Optical Engineering; S P I E - International Society for Optical Engineering; SPIE-Intl Soc Optical Eng (ISSN 1932-5150)
- Published
- 2016
- Language
- EN
- Field
- Engineering (Physical Sciences)