About this scholarly article

2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Optical image enhancement effect in 35 nm isolated pattern replication using diamond x-ray phase shift mask by Watanabe, H.; Itoga, K.; Kise, K.; Yabe, H.; Sumitani, H. is a scholarly article available to read on EtoBox.

Author

Watanabe, H.; Itoga, K.; Kise, K.; Yabe, H.; Sumitani, H.

Publisher

Japan Soc. Appl. Phys

Published

2002