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About this Engineering article
Silicides for 65 nm CMOS and Beyond by Kittl, Jorge A.; Lauwers, Anne; Chamirian, Oxana; Dal, Mark Van; Akheyar, Amal; Richard, Olivier; Lisoni, Judit G.; Potter, Muriel De; Lindsay, Richard; Maex, Karen is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kittl, Jorge A.; Lauwers, Anne; Chamirian, Oxana; Dal, Mark Van; Akheyar, Amal; Richard, Olivier; Lisoni, Judit G.; Potter, Muriel De; Lindsay, Richard; Maex, Karen
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2003
- Field
- Engineering (Physical Sciences)