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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - CLARIS G2: Development of Carbon Cluster Implantation by Nakashima, Y.; Hamamoto, N.; Umisedo, S.; Koga, Y.; Une, H.; Asai, H.; Maehara, N.; Hashino, Y.; Kawamura, Y.; Hashimoto, M.; Nagayama, T.; Tanjyo, M.; Onoda, H.; Horsky, T. N.; Hahto, S. K.; Sekar, K.; Matsuo, Jiro; Kase, Masataka; Aoki, Takaaki; Seki, Toshio is a scholarly article available to read on EtoBox.

Author
Nakashima, Y.; Hamamoto, N.; Umisedo, S.; Koga, Y.; Une, H.; Asai, H.; Maehara, N.; Hashino, Y.; Kawamura, Y.; Hashimoto, M.; Nagayama, T.; Tanjyo, M.; Onoda, H.; Horsky, T. N.; Hahto, S. K.; Sekar, K.; Matsuo, Jiro; Kase, Masataka; Aoki, Takaaki; Seki, Toshio
Publisher
AIP
Published
2011
Language
EN

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