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About this Engineering article
E-beam and RIE examination of chemically amplified positive-tone resist CAMP6 by P. Hudek; I.W. Rangelow; I.S. Daraktchiev; I. Kostič is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- P. Hudek; I.W. Rangelow; I.S. Daraktchiev; I. Kostič
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 1995
- Field
- Engineering (Physical Sciences)