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This document summarizes the fabrication of a Calcium Copper Titanate (CCTO) ceramic target for thin film deposition. Stoichiometric CCTO powder was synthesized through solid state reaction and sintered into a pellet. X-ray diffraction confirmed the formation of the CCTO phase. Scanning electron microscopy showed well-defined grains and grain boundaries in the ceramic microstructure. Electrical characterization found a room temperature dielectric constant of around 5000 at 1kHz, consistent with the internal

Author
Arindam Sen
Language
EN

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