Opening book details…
About this Engineering article
Preparation of silicon carbide powders by chemical vapour deposition of the SiH4-CH4-H2system by Lidong Chen; Takashi Goto; Toshio Hirai is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Lidong Chen; Takashi Goto; Toshio Hirai
- Publisher
- Springer; Springer-Verlag; Kluwer Academic Publishers; Springer Science and Business Media LLC; Society for Mining, Metallurgy and Exploration Inc. (ISSN 0022-2461)
- Published
- 1989
- Language
- EN
- Field
- Engineering (Physical Sciences)