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About this Engineering article
Efficient Approach to Cyclic Scheduling of Single-Arm Cluster Tools With Chamber Cleaning Operations and Wafer Residency Time Constraint by Yang, Fajun; Wu, Naiqi; Gao, Kaizhou; Zhang, Chunjiang; Zhu, Yuting; Su, Rong; Qiao, Yan is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yang, Fajun; Wu, Naiqi; Gao, Kaizhou; Zhang, Chunjiang; Zhu, Yuting; Su, Rong; Qiao, Yan
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0894-6507)
- Published
- 2018
- Language
- EN
- Field
- Engineering (Physical Sciences)