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About this Physics and Astronomy article
A Two-axis Micromachined Silicon Actuator with Micrometer Range Electrostatic Actuation and Picometer Sensitive Capacitive Detection by Ayela, F.; Bret, J. L.; Chaussy, J.; Fournier, T.; Ménégaz, E is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Ayela, F.; Bret, J. L.; Chaussy, J.; Fournier, T.; Ménégaz, E
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0034-6748)
- Published
- 2000
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)
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