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About this Engineering article
Low-Temperature PETEOS-to-PETEOS Wafer Bonding Using Titanium as Bonding Intermediate by Yu, Jian; Moore, Richard L.; Lee, Sang Hwui; McMahon, J. Jay; Lu, Jian-Qiang; Gutmann, Ronald J. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yu, Jian; Moore, Richard L.; Lee, Sang Hwui; McMahon, J. Jay; Lu, Jian-Qiang; Gutmann, Ronald J.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2006
- Field
- Engineering (Physical Sciences)