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Resolution Enhancement in Lithography by Smitha Kollerahithlu is a document available to read on EtoBox.
What is Resolution Enhancement in Lithography about?
The document discusses various resolution enhancement techniques for optical lithography, including optical proximity correction (OPC), optical phase shifting, and off-axis illumination. It also covers next generation lithographic methods such as electron beam lithography, extreme ultraviolet lithography, x-ray lithography, and ion beam lithography, noting challenges with each approach. Optical lithography is expected to remain the mainstream technology to the 100nm generation due to improvements, though al
- Author
- Smitha Kollerahithlu
- Language
- EN