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Two Modes of Laser Lithography Fabrication of Three-dimensional Submicrometer Structures by Shishkin, I. I.; Samusev, K. B.; Rybin, M. V.; Limonov, M. F.; Kiyan, R. V.; Chichkov, B. N.; Kivshar’, Yu. S.; Belov, P. A. is a Materials Science article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Materials Science.

Author
Shishkin, I. I.; Samusev, K. B.; Rybin, M. V.; Limonov, M. F.; Kiyan, R. V.; Chichkov, B. N.; Kivshar’, Yu. S.; Belov, P. A.
Publisher
SP MAIK Nauka/Interperiodica; Pleiades Publishing; Pleiades Publishing Ltd (ISSN 1063-7834)
Published
2014
Field
Materials Science (Physical Sciences)

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Browse all works by Shishkin, I. I.; Samusev, K. B.; Rybin, M. V.; Limonov, M. F.; Kiyan, R. V.; Chichkov, B. N.; Kivshar’, Yu. S.; Belov, P. A.