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About this Engineering article
Two-dimensional spatial profiles of size and density of particulates grown in RF silane plasmas by Shiratani, M.; Kishigaki, N.; Kawasaki, H.; Fukuzawa, T.; Watanabe, Y. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Shiratani, M.; Kishigaki, N.; Kawasaki, H.; Fukuzawa, T.; Watanabe, Y.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0093-3813)
- Published
- 1996
- Field
- Engineering (Physical Sciences)
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