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About this Materials Science article
Roles and Mechanism Analysis of Chitosan as a Green Additive in Low-tech Node Copper Film Chemical Mechanical Polishing by Zhou, Jiakai; Niu, Xinhuan; Wang, Zhi; Cui, Yaqi; Wang, Jianchao; Yang, Chenghui; Huo, Zhaoqing; Wang, Ru is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Zhou, Jiakai; Niu, Xinhuan; Wang, Zhi; Cui, Yaqi; Wang, Jianchao; Yang, Chenghui; Huo, Zhaoqing; Wang, Ru
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0927-7757)
- Published
- 2020
- Field
- Materials Science (Physical Sciences)