About this Engineering article
Nanolithography with an Atomic Force Microscope for Integrated Fabrication of Quantum Electronic Devices by Wendel, M.; Kühn, S.; Lorenz, H.; Kotthaus, J. P.; Holland, M is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Wendel, M.; Kühn, S.; Lorenz, H.; Kotthaus, J. P.; Holland, M
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1994
- Language
- EN
- Field
- Engineering (Physical Sciences)