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Can I read Fabrication of Silicon-based Two-dimensional Photonic Crystals on EtoBox?
Fabrication of Silicon-based Two-dimensional Photonic Crystals by Jian Zhu; Yong Zhang; Bailing Zhou; Jianfeng Gao; Shixing Jia is a Engineering article available to read on EtoBox.
What is Fabrication of Silicon-based Two-dimensional Photonic Crystals about?
Both triangular lattice and square lattice photonic crystals with lattice constant 400 nm and the radius 200 nm of the air pores in the silicon substrate have been designed, fabricated and realized. The processes of the fabrication of the two-dimensional photonic crystals, based on silicon, including mask making, electron-beam lithography, and inductively coupled plasma etching are introduced.
Who reads Fabrication of Silicon-based Two-dimensional Photonic Crystals?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Jian Zhu; Yong Zhang; Bailing Zhou; Jianfeng Gao; Shixing Jia
- Publisher
- Springer Science and Business Media LLC
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)