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Modifications and Characterization of a Silicon-based Microelectrode Array by G Buß; M.J Schöning; H Lüth; J.W Schultze is a Engineering article available to read on EtoBox.

What is Modifications and Characterization of a Silicon-based Microelectrode Array about?

A silicon-based microelectrode array for a wide variety of applications has been developed. This microelectrode array represents a well-suited alternative to current methods of chemical analysis and is useful in order to study and optimize eects such as material corrosion, etching processes and dierent passivation layers. Microelectrodes with a high aspect ratio for space-resolved measurements and an integrated energy supply could be realized by galvanic deposition. The used passivation layers were characterized by scanning electron microscopy (SEM), optical microscopy and small area X-ray photoelectron spectroscopy (XPS). The electrodes have been investigated by SEM, cyclic voltammetry and laser pro®lometry.

Who reads Modifications and Characterization of a Silicon-based Microelectrode Array?

Author

G Buß; M.J Schöning; H Lüth; J.W Schultze

Publisher

Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0013-4686)

Published

1999

Language

EN

Field

Engineering (Physical Sciences)