About this document
MEMS Course Syllabus - EE 205 by murali is a document available to read on EtoBox.
This document is the course syllabus for EE 205 Introduction to MEMS during the Fall 2017/2018 semester. The course will introduce concepts of micro electro mechanical systems including micro-machining techniques, transduction mechanisms, sensor/actuator design and analysis, and computer-aided design software. Students will complete a course project, midterm exam, and final exam for evaluation. Lectures will cover topics like scaling, lithography, bulk/surface micromachining, beams, noise, and accelerometer
- Author
- murali
- Language
- EN