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High optical quality ZnO epilayers grown on sapphire substrates by reactive magnetron sputtering of zinc target by Sukhvinder Singh; Ravi Kumar; Tapas Ganguli; R.S. Srinivasa; S.S. Major is a Engineering article available to read on EtoBox.

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Zinc oxide (ZnO) epilayers were grown on (0 0 0 1) sapphire substrates by reactive sputtering of a zinc target at substrate temperatures of 300 and 600 1C. High-resolution X-ray diffraction, UV-visible and photoluminescence (PL) measurements were carried out to obtain information about epitaxy, microstructure and optically active defects in these epilayers. Though the epilayer deposited at 600 1C showed a slightly smaller crystallite size along the growth direction as compared to that deposited at 300 1C, it was much superior in terms of other micro-structural parameters. It exhibited significantly small values of micro-strain (2 Â 10 À4 ), rocking curve width ($0.131), mosaic twist (0.351), and screw (6.6 Â 10 8 cm À2 )-and edge (2.9 Â 10 11 cm À2 )-type dislocation densities. Absorption and PL studies showed the high optical quality of the ZnO epilayer deposited at 600 1C, which exhibited a narrow (full-width at half-maximum-FWHM$96 meV) and intense band edge luminescence at room temperature. The micro-structural parameters and the sharp PL peak show that the reactively sputtered ZnO epilayer grown at 600 1C is comparable in epitaxial and optical quality with ZnO grown by other e

Who reads High optical quality ZnO epilayers grown on sapphire substrates by reactive magnetron sputtering of zinc target?

Author

Sukhvinder Singh; Ravi Kumar; Tapas Ganguli; R.S. Srinivasa; S.S. Major

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-0248)

Published

2008

Language

EN

Field

Engineering (Physical Sciences)