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About this Engineering article
A robust and flexible optimization technique for efficient shrinking of MEMS accelerometers by Manuel Engesser; Axel R. Franke; Matthias Maute; Daniel C. Meisel; Jan G. Korvink is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Manuel Engesser; Axel R. Franke; Matthias Maute; Daniel C. Meisel; Jan G. Korvink
- Publisher
- Springer-Verlag; Springer Verlag; Springer Science and Business Media LLC (ISSN 0946-7076)
- Published
- 2009
- Field
- Engineering (Physical Sciences)