About this scholarly article

2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - The particle-size-controllable growth of silica sol abrasive for chemical mechanical polishing by Gao, Peng; Liu, Yuling; Yao, Suying; Zhang, Jianxin is a scholarly article available to read on EtoBox.

Author

Gao, Peng; Liu, Yuling; Yao, Suying; Zhang, Jianxin

Publisher

IEEE

Published

2006

Language

EN