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About this Engineering article
4977. Ion-beam-induced-current (IBIC) monitoring of uniform and selective ion-etching processes in layered structures: H Sakaki et al, J Vac Sci Technol, 19 (1), 1981, 23–27 is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)
- Published
- 1982
- Language
- EN
- Field
- Engineering (Physical Sciences)