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Study of Structure and Phase Composition of Nanocrystal Silicon Carbonitride Films by N.I. Fainer; E.A. Maximovski; Yu.M. Rumyantsev; M.L. Kosinova; F.A. Kuznetsov is a Physics and Astronomy article available to read on EtoBox.

What is Study of Structure and Phase Composition of Nanocrystal Silicon Carbonitride Films about?

The novel ternary silicon carbonitride films were synthesised by RPECVD using hexamethyldisilazane Si 2 NH(CH 3 ) 6 as a volatile single-source precursor. Different analysis techniques such as IR, Raman spectroscopy, ellipsometry, XPS, SEM, HRTEM, and SAED were used to study their physical and chemical properties. Maximum attention has been concentrated on the application of synchrotron radiation in structure and phase investigation of thin films. On the basis of data of SEM, HRTEM and diffraction of synchrotron radiation, it was established that silicon carbonitride films represent a distribution of nanocrystals (20-90 ( A A) in an amorphous matrix. The nanocrystalline component is a pseudo a-Si 3 N 4 phase faceted by high-index planes. This phase can contain carbon atoms which have insufficient influence on the modification of the a-Si 3 N 4 lattice parameters due to the similar atomic radius of carbon and silicon.

Who reads Study of Structure and Phase Composition of Nanocrystal Silicon Carbonitride Films?

Author

N.I. Fainer; E.A. Maximovski; Yu.M. Rumyantsev; M.L. Kosinova; F.A. Kuznetsov

Publisher

Elsevier Science; Elsevier ; Elsevier BV; ScienceOpen (ISSN 0168-9002)

Published

2001

Language

EN

Field

Physics and Astronomy (Physical Sciences)