Can I read Microsensors, MEMS, and Smart Devices (Gardner/Microsensors, MEMS, and Smart Devices) on EtoBox?

Microsensors, MEMS, and Smart Devices (Gardner/Microsensors, MEMS, and Smart Devices) by Gardner, Julian W.; Varadan, Vijay K.; Awadelkarim, Osama O. is a scholarly article available to read on EtoBox.

What is Microsensors, MEMS, and Smart Devices (Gardner/Microsensors, MEMS, and Smart Devices) about?

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include:* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and

Author

Gardner, Julian W.; Varadan, Vijay K.; Awadelkarim, Osama O.

Publisher

John Wiley & Sons, Ltd,.

Published

2013

Language

EN

ISBN

9780470846087