About this Engineering article
Implication of the light polarisation for UV curing of pre-patterned resists by M. Wissen; N. Bogdanski; H.-C. Scheer; A. Bitz; G. Ahrens; G. Gruetzner is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- M. Wissen; N. Bogdanski; H.-C. Scheer; A. Bitz; G. Ahrens; G. Gruetzner
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2005
- Field
- Engineering (Physical Sciences)