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About this Engineering article
Self-Calibration of Coupling Error for 3-DOF Displacement Measurement of Planar Working Stage Based on Two Planar Gratings by Liu, Yong Meng; Li, Ze Lin; Du, De Hao; Yuan, Mao Qiang; Huang, Jing Zhi; Tan, Jiu Bin is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Liu, Yong Meng; Li, Ze Lin; Du, De Hao; Yuan, Mao Qiang; Huang, Jing Zhi; Tan, Jiu Bin
- Publisher
- Trans Tech Publications Inc.; Trans Tech Publications, Ltd.; Scitec Publications Ltd. (ISSN 1660-9336)
- Published
- 2017
- Language
- EN
- Field
- Engineering (Physical Sciences)