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About this Engineering article
Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist by J. Lee; H. Shin; S. Kim; S. Hong; J. Chung; H. Park; J. Moon is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J. Lee; H. Shin; S. Kim; S. Hong; J. Chung; H. Park; J. Moon
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2003
- Language
- EN
- Field
- Engineering (Physical Sciences)
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