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About this Engineering article
Sliding Mode Observer Based Multi-Layer Metal Plates Core Temperature On-Line Estimation for Semiconductor Intelligence Manufacturing by Tsai, Min-Che; Peng, Chao-Chung is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Tsai, Min-Che; Peng, Chao-Chung
- Publisher
- Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers Inc.; Institute of Electrical and Electronics Engineers (IEEE); Research Square (ISSN 2169-3536)
- Published
- 2020
- Language
- EN
- Field
- Engineering (Physical Sciences)