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About this Engineering article
The preparation and C-V characteristics of SiSi3N4 and SiSiO2Si3N4 structures by T.L. Chu; J.R. Szedon; C.H. Lee is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- T.L. Chu; J.R. Szedon; C.H. Lee
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0038-1101)
- Published
- 1967
- Field
- Engineering (Physical Sciences)