About this scholarly article

The Fourth International Conference on Advanced Semiconductor Devices and Microsystem - Ti Zr dielectric layers deposited by hot target reactive magnetron sputtering by Domaradzki, J.; Prociow, E.; Kaczmarek, D. is a scholarly article available to read on EtoBox.

Author

Domaradzki, J.; Prociow, E.; Kaczmarek, D.

Publisher

IEEE

Published

2002