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What is CNT-Based MEMS Pressure Sensors about?

This document summarizes the fabrication of carbon nanotube (CNT)-based piezoresistive pressure sensors using dielectrophoretic nanoassembly. CNT bundles are assembled across gold microelectrodes on polymethylmethacrylate diaphragms using dielectrophoresis. Preliminary results show the resistance of the CNT-based sensors varies quasi-linearly with applied pressure. Finite element modeling and experiments characterize the diaphragm deflection under pressure, which agrees with analytical models. CNTs show pot

Author

Edwin J. M

Language

EN