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About this Materials Science article
"Effects of fluorine implantation on polysilicon with high-k Er2O3 dielectrics" by Kao, Chyuan Haur; Fan, Hsuan Chi; Liao, Chien Jung; Cheng, Shih Nan is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Kao, Chyuan Haur; Fan, Hsuan Chi; Liao, Chien Jung; Cheng, Shih Nan
- Publisher
- Inderscience Publishers; Inderscience Enterprises Ltd. (ISSN 1475-7435)
- Published
- 2014
- Field
- Materials Science (Physical Sciences)