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About this Physics and Astronomy article
Influence of absorbed water components on SiOCH low-k reliability by Y. Li; I. Ciofi; L. Carbonell; N. Heylen; J. Van Aelst; M. R. Baklanov; G. Groeseneken; K. Maex; Z. Tőkei is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Y. Li; I. Ciofi; L. Carbonell; N. Heylen; J. Van Aelst; M. R. Baklanov; G. Groeseneken; K. Maex; Z. Tőkei
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 2008
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)