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About this Engineering article
Imprint Lithography for Integrated Circuit Fabrication by D. J. Resnick; W. J. Dauksher; D. Mancini; K. J. Nordquist; T. C. Bailey; S. Johnson; N. Stacey; J. G. Ekerdt; C. G. Willson; S. V. Sreenivasan; N. Schumaker is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- D. J. Resnick; W. J. Dauksher; D. Mancini; K. J. Nordquist; T. C. Bailey; S. Johnson; N. Stacey; J. G. Ekerdt; C. G. Willson; S. V. Sreenivasan; N. Schumaker
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2003
- Field
- Engineering (Physical Sciences)