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About this Materials Science article
Deposition of large-area, high-quality cubic boron nitride films by ECR-enhanced microwave-plasma CVD by W.J. Zhang; C.Y. Chan; K.M. Chan; I. Bello; Y. Lifshitz; S.T. Lee is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- W.J. Zhang; C.Y. Chan; K.M. Chan; I. Bello; Y. Lifshitz; S.T. Lee
- Publisher
- Springer; Springer-Verlag; Springer Verlag; Springer Science and Business Media LLC (ISSN 1432-0630)
- Published
- 2003
- Field
- Materials Science (Physical Sciences)
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