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Can I read Atomic Layer Deposition for Semiconductors on EtoBox?
Atomic Layer Deposition for Semiconductors by Yoo, Cha Young;Seong Hwang, Cheol is a science book available to read on EtoBox.
What is Atomic Layer Deposition for Semiconductors about?
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Who reads Atomic Layer Deposition for Semiconductors?
It is typically read by self-directed learners exploring a subject in depth.
Common subject areas: history, science, philosophy, social sciences.
- Author
- Yoo, Cha Young;Seong Hwang, Cheol
- Publisher
- Springer US : Imprint: Springer
- Published
- 2014
- Language
- EN
- ISBN
- 9781461480532
- Category
- science
- Subjects
- Engineering, Chemistry, Science
- Updated
- 2026-03-25
Other editions & translations
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