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About this Engineering article
Deposition of ultrathin parylene C films in the range of 18 nm to 142 nm: Controlling the layer thickness and assessing the closeness of the deposited films by Bastian E. Rapp; Achim Voigt; Marian Dirschka; Kerstin Länge is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Bastian E. Rapp; Achim Voigt; Marian Dirschka; Kerstin Länge
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2012
- Language
- EN
- Field
- Engineering (Physical Sciences)
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