About this scholarly article

2011 11th IEEE International Conference on Nanotechnology - Characterization of silicon nitride films for a silicon nanowire-based biosensor by Daunais, Thomas M.; Cheam, Daw Don; Bergstrom, Paul L.; Friedrich, Craig R. is a scholarly article available to read on EtoBox.

Author

Daunais, Thomas M.; Cheam, Daw Don; Bergstrom, Paul L.; Friedrich, Craig R.

Publisher

IEEE

Published

2011

Language

EN