About this Engineering article
Formation of Buried Nitride Layers by Ion Implantation by J. Danilowitsch; K. Gärtner; G. Götz is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J. Danilowitsch; K. Gärtner; G. Götz
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 1988
- Language
- EN
- Field
- Engineering (Physical Sciences)