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About this Engineering article

An Approach to Correct the Proximity Effect in Electron Beam Proximity Printing by P. Nehmiz is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
P. Nehmiz
Publisher
AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0022-5355)
Published
1981
Language
EN
Field
Engineering (Physical Sciences)