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Can I read Fabrication of polycrystalline TiO2 nanopatterns by TiO2 sol base imprint lithography on EtoBox?
Fabrication of polycrystalline TiO2 nanopatterns by TiO2 sol base imprint lithography by Kyung-min Yoon; Ki-yeon Yang; Heon Lee is a Engineering article available to read on EtoBox.
What is Fabrication of polycrystalline TiO2 nanopatterns by TiO2 sol base imprint lithography about?
This paper reports a process for fabricating TiO 2 nano-patterns using nanoimprint lithography and a sol-gel method. An ethanol-based TiO 2 sol was prepared using tetrabutylorthotitanate as a precursor and used as an imprint resin. A replicated polydimethylsiloxane (PDMS) mold was used as an imprint stamp. During the imprinting process at 5 atm and 200 °C for 1 h, the TiO 2 sol changed to a TiO 2 gel by absorbing the solvent into the PDMS mold. After imprinting, a TiO 2 gel pattern was formed on an oxidized Si wafer. After subsequent annealing, it confirmed that patterns of the master template were transferred to TiO 2 patterns by Scanning Electron Microscopy. Furthermore, Transmission Electron Microscopy and X-Ray Diffraction showed that the TiO 2 gel patterns had been converted to an inorganic polycrystalline TiO 2 pattern.
Who reads Fabrication of polycrystalline TiO2 nanopatterns by TiO2 sol base imprint lithography?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kyung-min Yoon; Ki-yeon Yang; Heon Lee
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2009
- Language
- EN
- Field
- Engineering (Physical Sciences)