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About this Engineering article
Artifacts observed during Auger profiling of Ta, Ti, and W metals, nitrides and oxynitrides by Ingrey, S. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ingrey, S.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0022-5355)
- Published
- 1982
- Language
- EN
- Field
- Engineering (Physical Sciences)