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About this Engineering article
Interfacial layer reduction and high permittivity tetragonal ZrO2 on germanium reaching ultrathin 0.39 nm equivalent oxide thickness by Lin, Cheng-Ming; Chang, Hung-Chih; Wong, I-Hsieh; Luo, Shih-Jan; Liu, C. W.; Hu, Chenming is a Engineering article available to read on EtoBox.
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- Author
- Lin, Cheng-Ming; Chang, Hung-Chih; Wong, I-Hsieh; Luo, Shih-Jan; Liu, C. W.; Hu, Chenming
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2013
- Language
- EN
- Field
- Engineering (Physical Sciences)