About this scholarly article

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Numerical noise reduction via diffraction for surface profiling interferometry by Toba, Hidemitsu; Lehmann, Peter H.; Osten, Wolfgang; Nakayama, Shigeru; Homma, Hideaki; Gastinger, Kay; Gemma, Takashi; Uchikawa, Kiyoshi is a scholarly article available to read on EtoBox.

Author

Toba, Hidemitsu; Lehmann, Peter H.; Osten, Wolfgang; Nakayama, Shigeru; Homma, Hideaki; Gastinger, Kay; Gemma, Takashi; Uchikawa, Kiyoshi

Publisher

SPIE

Published

2011

Language

EN